Agilent5530

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说明:  安捷伦激光干涉仪说明书, 激光干涉仪(laser interferometer) 以激光波长为已知长度利用迈克耳逊干涉系统测量位移的通用长度测量.工具激光干涉仪有单频的和双频的两种。 激光具有高强度、高度方向性、空间同调性、窄带宽和高度单色性等优点。目前常用来测量长度的干涉仪,主要是以迈克尔逊干涉仪为主,并以稳频氦氖激光为光源,构成一个具有干涉作用的测量系统。激光干涉仪可配合各种折射镜、反射镜等来作线性位置、速度、角度、真平度、真直度、平行度和垂直度等测量工作,并可作为精密工具机或测量仪器的校正工作。
(Instrument description Agilent laser interferometer, Laser interferometer (laser interferometer) is a universal length measuring known length by using Michelson interferometer for measurement of displacement by laser wavelength. Two kinds of tools of laser interferometer has a single frequency and dual band. The laser has high strength, high directivity, spatial coherence, narrow bandwidth and high monochromaticity etc.. At present, it is commonly used to measure the length of the interferometer, mainly based on the Michelson interferometer, and the stable frequency He Ne laser as the light source, which constitutes a measurement system with the interference effect. A laser interferometer with various refractive mirror to the linear position, speed, angle, flatness, straightness, parallelism and perpendicularity measurement work, and can be used as calibration of precision machine tool or measuring instrument.)

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Agilent5530.pdf (4116910, 2015-12-08)

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