Microlithography
所属分类：其他
开发工具：matlab
文件大小：272KB
下载次数：12
上传日期：2018-04-14 14:10:49
上 传 者：
curbals
说明： 用于duv光刻掩膜优化算法的模型，包含部分相干光照明，光刻胶分层模型，具体考虑了瞳孔放大系数，以及电磁波的畸变等因素。
(The model for DUV photolithography optimization algorithm, including partially coherent light illumination and photoresist stratification model, takes into account the factor of pupil magnification and electromagnetic wave distortion.)
文件列表:
Microlithography\@Litho\computeImage.m (7246, 2015-01-19)
Microlithography\@Litho\computePixelMaskSpectrum.m (183, 2017-09-07)
Microlithography\@Litho\computeSource.m (1749, 2017-09-14)
Microlithography\@Litho\computeSystem.m (1000, 2017-10-27)
Microlithography\@Litho\Litho.m (3174, 2017-10-27)
Microlithography\addPathToKernel.m (84, 2016-10-13)
Microlithography\ComputeEPE.m (656, 2017-05-25)
Microlithography\computeHp.m (1938, 2017-01-04)
Microlithography\computeHpSD.m (1690, 2017-08-27)
Microlithography\computeHpSD_1.m (1768, 2017-06-15)
Microlithography\computeJCC.m (2420, 2017-06-26)
Microlithography\computeVectorM.m (1598, 2017-06-15)
Microlithography\computeVectorM_1.m (1663, 2017-06-15)
Microlithography\computeVectorT.m (681, 2017-06-15)
Microlithography\computeVectorT_1.m (744, 2017-09-13)
Microlithography\conv2mtx_same.m (1534, 2013-08-20)
Microlithography\ConvInFreq.m (474, 2017-03-31)
Microlithography\CSTIC2017PrepImage.m (460, 2016-12-14)
Microlithography\evolve_normal_ENO2_modified.m (1582, 2017-06-14)
Microlithography\FindSmallestTwoExpo.m (103, 2016-10-21)
Microlithography\GetZernikeXYPoly.m (3260, 2017-10-27)
Microlithography\gssLitho.m (1675, 2017-05-19)
Microlithography\gssMO.m (2008, 2017-06-13)
Microlithography\imageEPS.m (493, 2017-08-24)
Microlithography\images\img11.bmp (5690, 2017-11-04)
Microlithography\images\img12.bmp (5690, 2017-11-04)
Microlithography\images\img13.bmp (5690, 2017-11-04)
Microlithography\images\img14.bmp (5690, 2017-11-04)
Microlithography\images\img15.bmp (5690, 2017-11-04)
Microlithography\images\img9.bmp (5690, 2017-09-08)
Microlithography\images\img9c.bmp (1678, 2017-09-08)
Microlithography\images\resm11.bmp (67898, 2017-11-08)
Microlithography\images\resm12.bmp (67898, 2017-11-08)
Microlithography\images\resm13.bmp (67898, 2017-11-08)
Microlithography\images\resm14.bmp (67898, 2017-11-08)
Microlithography\images\resm15.bmp (67898, 2017-11-08)
Microlithography\images\ress11.bmp (2006, 2017-11-08)
Microlithography\images\ress12.bmp (2006, 2017-11-08)
Microlithography\images\ress13.bmp (2006, 2017-11-08)
Microlithography\images\ress14.bmp (2006, 2017-11-08)
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