Precision-Motion-Control(book).rar

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Tan Kok Kiong &#8226 Lee Tong Heng &#8226 Huang Sunan Precision Motion Control Design and Implementation Second Edition
Precision-Motion-Control(book).rar
  • Precision Motion Control(book)
  • 2. Precision Tracking Motion Control.pdf
    2.5MB
  • 1. Introduction.pdf
    218.5KB
  • 5. Geometrical Error Compensation.pdf
    2.5MB
  • 9. back-matter.pdf
    1.2MB
  • 6. Electronic Interpolation Errors.pdf
    688.7KB
  • 8. Other Engineering Aspects.pdf
    779.9KB
  • 7. Vibration Monitoring and Control.pdf
    1.9MB
  • 4. Co-ordinated Motion Control of Gantry Systems.pdf
    1.6MB
  • 3. Automatic Tuning of Control Parameters.pdf
    651.6KB
  • 0. Series Editors’ Foreword.pdf
    229KB
内容介绍
<html xmlns="http://www.w3.org/1999/xhtml"> <head> <meta charset="utf-8"> <meta name="generator" content="pdf2htmlEX"> <meta http-equiv="X-UA-Compatible" content="IE=edge,chrome=1"> <link rel="stylesheet" href="https://static.pudn.com/base/css/base.min.css"> <link rel="stylesheet" href="https://static.pudn.com/base/css/fancy.min.css"> <link rel="stylesheet" href="https://static.pudn.com/prod/directory_preview_static/625039a86caf596192fdbe78/raw.css"> <script src="https://static.pudn.com/base/js/compatibility.min.js"></script> <script src="https://static.pudn.com/base/js/pdf2htmlEX.min.js"></script> <script> try{ pdf2htmlEX.defaultViewer = new pdf2htmlEX.Viewer({}); }catch(e){} </script> <title></title> </head> <body> <div id="sidebar" style="display: none"> <div id="outline"> </div> </div> <div id="pf1" class="pf w0 h0" data-page-no="1"><div class="pc pc1 w0 h0"><img class="bi x0 y0 w1 h1" alt="" src="https://static.pudn.com/prod/directory_preview_static/625039a86caf596192fdbe78/bg1.jpg"><div class="t m0 x1 h2 y1 ff1 fs0 fc0 sc0 ls0 ws0">2</div><div class="t m0 x1 h2 y2 ff1 fs0 fc0 sc0 ls1 ws0">Precision<span class="_"> </span>T<span class="_ _0"></span>rac<span class="_ _1"></span>king<span class="_"> </span>Motion<span class="_"> </span>Con<span class="_ _1"></span>trol</div><div class="t m0 x1 h3 y3 ff2 fs1 fc0 sc0 ls2 ws0">In<span class="_ _2"> </span>this<span class="_ _2"> </span>c<span class="_ _1"></span>hapters,<span class="_ _2"> </span>t<span class="_ _1"></span>wo<span class="_ _2"> </span>precision<span class="_ _3"> </span>actuation<span class="_ _3"> </span>systems<span class="_ _2"> </span>using<span class="_ _3"> </span>piezo<span class="_ _4"></span>electric<span class="_ _3"> </span>actuators</div><div class="t m0 x1 h3 y4 ff2 fs1 fc0 sc0 ls3 ws0">and<span class="_ _5"> </span>permanent<span class="_"> </span>magnet<span class="_ _5"> </span>linear<span class="_ _5"> </span>motor<span class="ls4">s<span class="_"> </span>will<span class="_ _5"> </span>b<span class="_ _4"></span>e<span class="_"> </span>presented.<span class="_"> </span>Common<span class="_ _5"> </span>con&#64257;gura-</span></div><div class="t m0 x1 h3 y5 ff2 fs1 fc0 sc0 ls5 ws0">tions<span class="_ _5"> </span>of<span class="_ _5"> </span>these<span class="_ _5"> </span>systems,<span class="_ _5"> </span>their<span class="_ _6"> </span>mathematical<span class="_ _5"> </span>model<span class="_ _5"> </span>as<span class="_ _6"> </span>we<span class="_ _1"></span>ll<span class="_ _5"> </span>as<span class="_ _5"> </span>control<span class="_"> </span>schemes</div><div class="t m0 x1 h3 y6 ff2 fs1 fc0 sc0 ls6 ws0">will<span class="_"> </span>b<span class="_ _4"></span>e<span class="_"> </span>included.</div><div class="t m0 x1 h4 y7 ff1 fs2 fc0 sc0 ls7 ws0">2.1<span class="_ _7"> </span>Piezo<span class="_ _4"></span>electric<span class="_ _6"> </span>Actuators</div><div class="t m0 x1 h3 y8 ff2 fs1 fc0 sc0 ls8 ws0">In<span class="_"> </span>the<span class="_"> </span>area<span class="_ _2"> </span>of<span class="_"> </span>micro-<span class="_"> </span>and<span class="_"> </span>nano-scale<span class="_ _2"> </span>systems,<span class="_"> </span>the<span class="_"> </span>piezo<span class="_ _4"></span>electric<span class="_ _2"> </span>actuator<span class="_"> </span>(P<span class="_ _0"></span>A)</div><div class="t m0 x1 h3 y9 ff2 fs1 fc0 sc0 ls9 ws0">has<span class="_ _5"> </span>b<span class="_ _4"></span>ecome<span class="_ _6"> </span>an<span class="_ _6"> </span>increasing<span class="_ _4"></span>ly<span class="_"> </span>p<span class="_ _4"></span>opular<span class="_ _6"> </span>candidate<span class="_ _6"> </span>as<span class="_ _6"> </span>a<span class="_ _6"> </span>precise<span class="_ _6"> </span>actuato<span class="_ _8"></span>r,<span class="_ _5"> </span>due<span class="_ _6"> </span>to</div><div class="t m0 x1 h3 ya ff2 fs1 fc0 sc0 lsa ws0">its<span class="_"> </span>abilit<span class="_ _1"></span>y<span class="_"> </span>to<span class="_"> </span>ac<span class="_ _1"></span>hieve<span class="_ _2"> </span>high<span class="_"> </span>precision<span class="_"> </span>and<span class="_"> </span>its<span class="_ _2"> </span>versatility<span class="_ _2"> </span>to<span class="_"> </span>be<span class="_"> </span>implement<span class="_ _1"></span>ed<span class="_"> </span>in<span class="_"> </span>a</div><div class="t m0 x1 h3 yb ff2 fs1 fc0 sc0 lsb ws0">wide<span class="_"> </span>range<span class="_ _2"> </span>of<span class="_"> </span>applications.<span class="_"> </span>More<span class="_ _2"> </span>sp<span class="_ _8"></span>eci&#64257;cally<span class="_ _1"></span>,<span class="_ _3"> </span>the<span class="_"> </span>P<span class="_ _1"></span>A<span class="_ _3"> </span>can<span class="_"> </span>provide<span class="_ _2"> </span>very<span class="_ _3"> </span>pr<span class="_ _8"></span>ecise</div><div class="t m0 x1 h3 yc ff2 fs1 fc0 sc0 lsc ws0">po<span class="_ _8"></span>sitioning<span class="_ _5"> </span>(of<span class="_"> </span>the<span class="_ _5"> </span>order<span class="_"> </span>o<span class="_ _8"></span>f<span class="_"> </span>na<span class="_ _8"></span>nometers)<span class="_"> </span>a<span class="_ _8"></span>nd<span class="_"> </span>g<span class="_ _8"></span>enerate<span class="_"> </span>hig<span class="_ _8"></span>h<span class="_"> </span>fo<span class="_ _8"></span>rces<span class="_"> </span>(up<span class="_ _5"> </span>to<span class="_"> </span>few</div><div class="t m0 x1 h3 yd ff2 fs1 fc0 sc0 lsd ws0">thousands<span class="_ _3"> </span>newton).<span class="_ _3"> </span>The<span class="_ _3"> </span>incr<span class="_ _8"></span>easingly<span class="_ _3"> </span>widespread<span class="_ _3"> </span>industrial<span class="_ _3"> </span>a<span class="_ _8"></span>pplications<span class="_ _3"> </span>of<span class="_ _3"> </span>the</div><div class="t m0 x1 h3 ye ff2 fs1 fc0 sc0 lse ws0">P<span class="_ _9"></span>A<span class="_ _6"> </span>in<span class="_ _a"> </span>v<span class="_ _9"></span>a<span class="_ _8"></span>rious<span class="_ _a"> </span>optical<span class="_ _6"> </span>&#64257;br<span class="_ _8"></span>e<span class="_ _b"> </span>alignment,<span class="_ _6"> </span>mask<span class="_ _b"> </span>alig<span class="_ _8"></span>nment,<span class="_ _6"> </span>and<span class="_ _b"> </span>medical<span class="_ _b"> </span>micro<span class="_ _8"></span>-</div><div class="t m0 x1 h3 yf ff2 fs1 fc0 sc0 lsf ws0">manipulation<span class="_ _6"> </span>systems<span class="_ _5"> </span>are<span class="_ _6"> </span>self-evident<span class="_ _5"> </span>testimonies<span class="_ _6"> </span>of<span class="_ _6"> </span>the<span class="_ _6"> </span>e&#64256;ectiv<span class="_ _1"></span>eness<span class="_ _6"> </span>of<span class="_ _6"> </span>the</div><div class="t m0 x1 h3 y10 ff2 fs1 fc0 sc0 ls10 ws0">P<span class="_ _9"></span>A<span class="_"> </span>in<span class="_"> </span>these<span class="_"> </span>application<span class="_"> </span>domains.</div><div class="t m0 x2 h3 y11 ff2 fs1 fc0 sc0 ls6 ws0">In<span class="_ _6"> </span>spite<span class="_ _a"> </span>of<span class="_ _b"> </span>the<span class="_ _b"> </span>b<span class="_ _8"></span>ene&#64257;ts<span class="_ _b"> </span>of<span class="_ _b"> </span>a<span class="_ _b"> </span>P<span class="_ _9"></span>A<span class="_ _b"> </span>in<span class="_ _b"> </span>these<span class="_ _b"> </span>application<span class="_ _b"> </span>domains,<span class="_ _b"> </span>there<span class="_ _b"> </span>are</div><div class="t m0 x1 h3 y12 ff2 fs1 fc0 sc0 lsa ws0">challenges<span class="_ _3"> </span>in<span class="_ _3"> </span>the<span class="_"> </span>d<span class="_ _1"></span>esig<span class="_ _8"></span>n<span class="_ _3"> </span>a<span class="_ _8"></span>nd<span class="_ _3"> </span>co<span class="_ _8"></span>ntrol<span class="_ _3"> </span>of<span class="_ _3"> </span>these<span class="_ _2"> </span>devices.<span class="_ _2"> </span>In<span class="_ _3"> </span>the<span class="_"> </span>follo<span class="_ _1"></span>wing<span class="_ _3"> </span>sectio<span class="_ _8"></span>ns,</div><div class="t m0 x1 h3 y13 ff2 fs1 fc0 sc0 ls11 ws0">issues<span class="_"> </span>pertaining<span class="_"> </span>to<span class="_"> </span>P<span class="_ _9"></span>A<span class="_"> </span>design<span class="_"> </span>and<span class="_"> </span>con<span class="_ _1"></span>trol<span class="_ _2"> </span>will<span class="_"> </span>b<span class="_ _8"></span>e<span class="_"> </span>discussed<span class="_"> </span>in<span class="_"> </span>detail.</div><div class="t m0 x1 h3 y14 ff3 fs1 fc0 sc0 ls12 ws0">2.1.1<span class="_ _7"> </span>T<span class="_ _9"></span>yp<span class="_ _8"></span>es<span class="_"> </span>of<span class="_"> </span>Piezo<span class="_ _8"></span>electric<span class="_ _5"> </span>Act<span class="_ _1"></span>uator<span class="_"> </span>Con&#64257;guration</div><div class="t m0 x1 h3 y15 ff2 fs1 fc0 sc0 lsd ws0">The<span class="_ _2"> </span>P<span class="_ _9"></span>A<span class="_ _3"> </span>o<span class="_ _8"></span>&#64256;ers<span class="_ _2"> </span>unique<span class="_ _2"> </span>and<span class="_ _2"> </span>comp<span class="_ _8"></span>elling<span class="_ _2"> </span>adv<span class="_ _1"></span>antages<span class="_ _3"> </span>in<span class="_"> </span>nanometer<span class="_ _3"> </span>re<span class="_ _8"></span>solution<span class="_ _2"> </span>and</div><div class="t m0 x1 h3 y16 ff2 fs1 fc0 sc0 lsb ws0">high-sp<span class="_ _8"></span>eed<span class="_ _3"> </span>applications.<span class="_ _2"> </span>T<span class="_ _9"></span>o<span class="_ _3"> </span>derive<span class="_ _3"> </span>maxim<span class="_ _1"></span>um<span class="_ _2"> </span>pe<span class="_ _8"></span>rformance<span class="_ _3"> </span>fro<span class="_ _8"></span>m<span class="_ _3"> </span>P<span class="_ _9"></span>As,<span class="_ _3"> </span>a<span class="_ _2"> </span>v<span class="_ _1"></span>ariety</div><div class="t m0 x1 h3 y17 ff2 fs1 fc0 sc0 ls13 ws0">of<span class="_"> </span>con&#64257;guration<span class="_ _2"> </span>can<span class="_"> </span>be<span class="_"> </span>designed<span class="_ _2"> </span>to<span class="_"> </span>adapt<span class="_"> </span>t<span class="_ _1"></span>o<span class="_"> </span>v<span class="_ _1"></span>arious<span class="_ _2"> </span>requiremen<span class="_ _1"></span>ts.</div><div class="t m0 x1 h3 y18 ff3 fs1 fc0 sc0 lse ws0">Stac<span class="_ _1"></span>k<span class="_ _6"> </span>Design</div><div class="t m0 x1 h3 y19 ff2 fs1 fc0 sc0 ls14 ws0">The<span class="_ _b"> </span>most<span class="_ _a"> </span>common<span class="_ _b"> </span>design<span class="_ _b"> </span>for<span class="_ _a"> </span>P<span class="_ _9"></span>As<span class="_ _b"> </span>is<span class="_ _a"> </span>a<span class="_ _a"> </span>stack<span class="_ _b"> </span>of<span class="_ _b"> </span>ceramic<span class="_ _b"> </span>lay<span class="_ _1"></span>ers<span class="_ _b"> </span>(see<span class="_ _b"> </span>Figure</div><div class="t m0 x1 h3 y1a ff2 fs1 fc0 sc0 ls15 ws0">2.1).<span class="_ _6"> </span>Such<span class="_ _6"> </span>devices<span class="_ _6"> </span>are<span class="_ _b"> </span>capable<span class="_ _5"> </span>of<span class="_ _b"> </span>achi<span class="_ _1"></span>eving<span class="_ _b"> </span>high<span class="_ _6"> </span>displacemen<span class="_ _1"></span>ts<span class="_ _b"> </span>and<span class="_ _6"> </span>holding</div></div><div class="pi" data-data='{"ctm":[2.037103,0.000000,0.000000,2.037103,-173.234022,-270.244158]}'></div></div> </body> </html>
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